Kategorien

Teilkatalog Robotik 10-2019 (nur in englischer Sprache)

Hier finden Sie technische Daten, Masszeichnungen sowie Bestellangaben zu den Produkten der iselRobotik!

Laden Sie den neu überarbeiteten Teilkatalog Robotik 10-2019 als PDF-Datei herunter!
(nur in englischer Sprache verfügbar - ca. 5 MB)

The product offerings contained in this catalog are a subset of robotic products offered by the isel group. Our products are specifically designed and engineered to address the unique needs and requirements of the semiconductor, flat panel display, nano-technology, and related industries.

Should you have a special application or product requirement not fully addressed by the offerings in this catalog, please contact us we will be delighted to work with you to find a solution that meets your needs.
Anfragen
WAFER HANDLING COMPONENTS
for the semiconductor industry
2
EFFICIENT & ECONOMICAL
WAFER HANDLERS
YOUR ADDED VALUE
IN THE SEMI-CONDUCTOR INDUSTRY

high production depth made in Germany



3
3


designed and engineered to address the unique needs






CONTENT
 
   


 




 
Thomas Völlinger



Andreas Möller



Michael Raschke



Vanessa Krack
Team assistant


INNOVATIVE
TECHNOLOGY

-


FIRST CLASS SERVICE

support and ongoing project support from




term partners in Asia or our partner in


CUSTOMER-SPECIFIC
SOLUTIONS


-






INNOVATIVE ROBOT
TECHNOLOGY FOR
WAFER HANDLING

-



WAFER HANDLING ROBOT | IWH

CHARACTERISTICS













SPECIFICATIONS

T
R
Z

range
Z
 
theta 
 

speed
T
R
Z




 

 

IWH TA07S10 F-1

323,7 (S10)
430,8 (S14)
323,7 (S10)
430,8 (S14)
25
57
49
35,3
4x M3
S10
25
57
65
35,3
4x M3
50,8
4x M4
S14
323,7 (S10)
430,8 (S14)
323,7 (S10)
430,8 (S14)
25
57
49
35,3
4x M3
S10
25
57
65
35,3
4x M3
50,8
4x M4
S14
323,7 (S10)
430,8 (S14)
323,7 (S10)
430,8 (S14)
25
57
49
35,3
4x M3
S10
25
57
65
35,3
4x M3
50,8
4x M4
S14
323,7 (S10)
430,8 (S14)
323,7 (S10)
430,8 (S14)
25
57
49
35,3
4x M3
S10
25
57
65
35,3
4x M3
50,8
4x M4
S14
IWH TA 07S_F-1 IWH BA 07S_F-1
DIMENSIONS

IWH TA10S10HD F-1
Fraunhofer
IPA
TESTED
DEVICE
isel Germany AG
IWH-BA13S14HDF-1
Report No. IS 1103-547
WAFER HANDLING ROBOT | IWH

CHARACTERISTICS













SPECIFICATIONS

T
R
Z

range
Z
 
theta 
 

speed
T
R
Z





 

 

11
330
(TA13)
588,5
(TA13)
690
(TA17)
105
329,9
(TA13)
431,8
(TA17)
254
(TA10)
235
277
(TA10 / TA17 / TA21)
791,5 (TA21) 533,4 (TA21)
513,5
(TA10)
266,7
(S10)
365,8
(S14)
426,7
(S16)
508
(S20)
75
304,8
(S12)
259,1 (313,7)
3 x M6
341,7 (S10)
379,8 (S12)
440,8 (S14)
500,8 (S16)
583 (S20)
633,5
(BA10)
90
235
708,5
(BA13)
810
(BA17)
254
(BA10)
330,2
(BA13)
431,5
(BA17)
911,5 (BA21) 533,4 (BA21)
185
225
175
195
266,7
(S10)
304,8
(S12)
365,8
(S14)
426,7
(S16)
508
(S20)
75
341,7 (S10)
379,8 (S12)
440,8 (S14)
501,7 (S16)
583 (S20)
4 x M6
67
25
50,8 (4x M4)
35,3 (4x M3)
IWH TA __ S __ HD F-1
IWH BA__ S __ HD F-1
330
(TA13)
588,5
(TA13)
690
(TA17)
105
329,9
(TA13)
431,8
(TA17)
254
(TA10)
235
277
(TA10 / TA17 / TA21)
791,5 (TA21) 533,4 (TA21)
513,5
(TA10)
266,7
(S10)
365,8
(S14)
426,7
(S16)
508
(S20)
75
304,8
(S12)
259,1 (313,7)
3 x M6
341,7 (S10)
379,8 (S12)
440,8 (S14)
500,8 (S16)
583 (S20)
633,5
(BA10)
90
235
708,5
(BA13)
810
(BA17)
254
(BA10)
330,2
(BA13)
431,5
(BA17)
911,5 (BA21) 533,4 (BA21)
185
225
175
195
266,7
(S10)
304,8
(S12)
365,8
(S14)
426,7
(S16)
508
(S20)
75
341,7 (S10)
379,8 (S12)
440,8 (S14)
501,7 (S16)
583 (S20)
4 x M6
67
25
50,8 (4x M4)
35,3 (4x M3)
IWH TA __ S __ HD F-1
IWH BA__ S __ HD F-1
330
(TA13)
588,5
(TA13)
690
(TA17)
105
329,9
(TA13)
431,8
(TA17)
254
(TA10)
235
277
(TA10 / TA17 / TA21)
791,5 (TA21) 533,4 (TA21)
513,5
(TA10)
266,7
(S10)
365,8
(S14)
426,7
(S16)
508
(S20)
75
304,8
(S12)
259,1 (313,7)
3 x M6
341,7 (S10)
379,8 (S12)
440,8 (S14)
500,8 (S16)
583 (S20)
633,5
(BA10)
90
235
708,5
(BA13)
810
(BA17)
254
(BA10)
330,2
(BA13)
431,5
(BA17)
911,5 (BA21) 533,4 (BA21)
185
225
175
195
266,7
(S10)
304,8
(S12)
365,8
(S14)
426,7
(S16)
508
(S20)
75
341,7 (S10)
379,8 (S12)
440,8 (S14)
501,7 (S16)
583 (S20)
4 x M6
67
25
50,8 (4x M4)
35,3 (4x M3)
IWH TA __ S __ HD F-1
IWH BA__ S __ HD F-1
330
(TA13)
588,5
(TA13)
690
(TA17)
105
329,9
(TA13)
431,8
(TA17)
254
(TA10)
235
277
(TA10 / TA17 / TA21)
791,5 (TA21) 533,4 (TA21)
513,5
(TA10)
266,7
(S10)
365,8
(S14)
426,7
(S16)
508
(S20)
75
304,8
(S12)
259,1 (313,7)
3 x M6
341,7 (S10)
379,8 (S12)
440,8 (S14)
500,8 (S16)
583 (S20)
633,5
(BA10)
90
235
708,5
(BA13)
810
(BA17)
254
(BA10)
330,2
(BA13)
431,5
(BA17)
911,5 (BA21) 533,4 (BA21)
185
225
175
195
266,7
(S10)
304,8
(S12)
365,8
(S14)
426,7
(S16)
508
(S20)
75
341,7 (S10)
379,8 (S12)
440,8 (S14)
501,7 (S16)
583 (S20)
4 x M6
67
25
50,8 (4x M4)
35,3 (4x M3)
IWH TA __ S __ HD F-1
IWH BA__ S __ HD F-1
IWH TA __ S __ HD F-1 IWH BA__ S __ HD F-1
DIMENSIONS
12
IWH TA10S16 F-1
WAFER HANDLING ROBOT | IWH

CHARACTERISTICS










SPECIFICATIONS

T
R
Z

range
Z
 
theta 
 

speed
T
R
Z





 

 

13
330
(TA13)
690
(TA17)
235
277
( TA10 / TA17 / TA21)
142
254
(TA10)
329,9
(TA13)
431,8
(TA17)
791,5 (TA21) 533,4 (TA21)
513,5
(TA10)
588,5
(TA13)
330
(TA13)
690
(TA17)
235
277
( TA10 / TA17 / TA21)
142
254
(TA10)
329,9
(TA13)
431,8
(TA17)
791,5 (TA21) 533,4 (TA21)
513,5
(TA10)
588,5
(TA13)
533,4
(S24)
304,8
(S16)
75
731,5 (S28)
406,4 (S21)
278,2 (S16)
342 (S21)
380 (S24)
441 (S28)
259,1 (Ø313,7)
3xM6
670,5
(BA10)
745,5
(BA13)
847
(BA17)
127
330,2
(BA13)
431,8
(BA17)
533,4 (BA21) 948,5 (BA21)
254 (BA10)
235
185
225
175
195
406,4
(S21)
533,4
(S24)
304,8
(S16)
731,5 (S28)
75
278,2 (S16)
342 (S21)
380 (S24)
441 (S28)
4xM6
67
25
50,8 (4x M4)
35,3 (4x M3)
IWH TA __ S __ F-1
IWH BA __ S __ F-1
330
(TA13)
690
(TA17)
235
277
( TA10 / TA17 / TA21)
142
254
(TA10)
329,9
(TA13)
431,8
(TA17)
791,5 (TA21) 533,4 (TA21)
513,5
(TA10)
588,5
(TA13)
533,4
(S24)
304,8
(S16)
75
731,5 (S28)
406,4 (S21)
278,2 (S16)
342 (S21)
380 (S24)
441 (S28)
259,1 (Ø313,7)
3xM6
670,5
(BA10)
745,5
(BA13)
847
(BA17)
127
330,2
(BA13)
431,8
(BA17)
533,4 (BA21) 948,5 (BA21)
254 (BA10)
235
185
225
175
195
406,4
(S21)
533,4
(S24)
304,8
(S16)
731,5 (S28)
75
278,2 (S16)
342 (S21)
380 (S24)
441 (S28)
4xM6
67
25
50,8 (4x M4)
35,3 (4x M3)
IWH TA __ S __ F-1
IWH BA __ S __ F-1
330
(TA13)
690
(TA17)
235
277
( TA10 / TA17 / TA21)
142
254
(TA10)
329,9
(TA13)
431,8
(TA17)
791,5 (TA21) 533,4 (TA21)
513,5
(TA10)
588,5
(TA13)
533,4
(S24)
304,8
(S16)
75
731,5 (S28)
406,4 (S21)
278,2 (S16)
342 (S21)
380 (S24)
441 (S28)
259,1 (Ø313,7)
3xM6
670,5
(BA10)
745,5
(BA13)
847
(BA17)
127
330,2
(BA13)
431,8
(BA17)
533,4 (BA21) 948,5 (BA21)
254 (BA10)
235
185
225
175
195
406,4
(S21)
533,4
(S24)
304,8
(S16)
731,5 (S28)
75
278,2 (S16)
342 (S21)
380 (S24)
441 (S28)
4xM6
67
25
50,8 (4x M4)
35,3 (4x M3)
IWH TA __ S __ F-1
IWH BA __ S __ F-1
IWH TA __ S __ F-1 IWH BA __ S __ F-1
DIMENSIONS

IWH TA13S24HDP F-3
WAFER HANDLING ROBOT | IWH

CHARACTERISTICS










SPECIFICATIONS

T
R
Z

range
Z
 
theta 
 

speed
T
R
Z





 

 


7“ [372,5mm]
10“ [449mm]
13“ [525mm]
17“ [576mm]
21“[677,6mm]
DIMENSIONS
mounting screws
turning radius min. Ø 700 mm

WAFER HANDLING ROBOT | IWH

CHARACTERISTICS

















SPECIFICATIONS

T
R
Z

range
Z
 
theta 
 

speed
T
R
Z





 

 

IWH F-3
dual arm robot
Vaccum displays


330 (TA)
7" [387,5mm]
10" [464mm]
13" [540mm]
17" [591mm]
21" [692,6mm]
11,18
284
10,98
279
7" [177,8mm]
10" [254mm]
13" [381mm]
17" [431,8mm]
21" [533,4mm]
[0,39]
10
2x5,25" / 7,2"
110,5
210
4xM8
166,2
216,5
455 (10" Arm)
555 (14" Arm)
530 (10" Arm)
696 (14" Arm)
300 3xM6
DIMENSIONS

WAFER HANDLING ROBOT | IWH

CHARACTERISTICS














SPECIFICATIONS

T
R
Z

range
Z
 
theta 
 

speed
T
R
Z




 

 

IWH F-3 SHD dual arm robot


420 (TA)
350
13" [542mm]
15" [614mm]
10
13" [330mm]
15" [400mm]
156,5
7,2" [182,9mm]
120
260
4x M8
217,5
300
23,54" [598 mm]
24,80
27,8" [705,8mm]
390
3xM6
DIMENSIONS
mounting screws
turning radius min. Ø 630 mm

CONTROLLER & SOFTWARE | „ADVANCED“




CHARACTERISTICS














ADVANCED
controller front
ADVANCED
controller back
21
ACCESSORY
TEACH PENDANT












SOFTWARE
22
CONTROLLER & SOFTWARE | „STANDARD“









CHARACTERISTICS







isel STANDARD robot controller
All-in-one-design
23
RCC software
ACCESSORY
HAND TERMINAL






teach function
SOFTWARE




END EFFECTORS | IEE SERIES
CHARACTERISTICS

high rigidity



OPTIONS




Paddle

Horse shoe

sensor
Double

mapping
Exclusion
zone vacuum

Customized
Filmring




OPTIONS




ACCESSORY
VACUUM CONTROL
fast response


integrated in endeffector


end effectors
Extended
version
Ceramic
Edge grip
Vacuum
exclusion zone




IMS-MDW1
Separate through
beam unit
PD45
Through beam
sensor
WAFER MAPPING SENSORS
IMS-MDW1



PD45



THROUGH BEAM SENSOR

integrated in endeffector
or as separate unit

FLIP MODULE IFM-300-3







ACCESSORIES

YAW AXIS






ALIGNMENT ON THE FLY




END EFFECTOR CHANGER


changing system




CHARACTERISTICS









SPECIFICATIONS
 
 
 
 32 m
 






top mounted
side mounted
 ILD SERIES

111
50
14.5
8.1
12
7
37.5
150
A
211
Length
260
50
150
235
~ 26
50
190 148
Accessories: assemble set
111
50
14.5
8.1
12
7
37.5
150
A
211
Length
260
50
150
235
~ 26
50
190 148
Accessories: assemble set
DIMENSIONS
ACCESSORY
ASSEMBLE SET





LPA SERIES
FEATURES






and CCD sensor















and CCD sensor















Three-axis prealigner LPA series


Three-axis edge
handling prealigner

Single-axis prealigner
LPA series


31
CHARACTERISTICS
26-3 38-3 58-3 312-3 812-3 1218-3 25-1E 38-1E 58-1E 312-1E 812-1E 1218-1E
N/A N/A
10mm 9mm
W
L404mm 328mm
H
More than 70000 hours
267mm 317mm
Specifications Standalone Embedded
450mm
Square Substrates
Wafer
Diameter
MTBF
Host Interface
Flat/Notch
Compatibility
Wafer Opacity
Cleanliness
RS 232, Ethernet
Semi Standards Compliant
Edge Handling
PREALIGNER MODEL
150mm
200mm
300mm
100mm
3“
2“
125mm
Type
4EH, 45EH
5EH, 45EH, 56EH
6EH, 56EH
8EH, 8ET
173mm
1.7mm to 2.0mm10mm
0.06º
0.04º
50um
Edge Handling
190mm to 206mm
267mm or 317mm
95mm
266mm
191mm
12ET
N/A
Centering Accuracy
Facilities Required
12mm
0.04º
173mm
190mm
Weight
Servo Axes
Handling
0.02º
0.04º
0.02º
25um 25um
5.3kg to 6.0kg
Transparent, Semi-Transparent
Class 1
10000 CPR
Encoder
24000 CPR
Encoder
Angular
Accuracy
(3 Sigma)
(3 Sigma)
Body
Dimensions
Max Initial Offset
3.4kg to 3.8kg
One
5.0kg to 5.7kg
Three Three
Vacuum Chuck and Pins Vacuum Chuck
100-240VAC, 50/60Hz; 48VA or 24 DC/2A, Vacuum 12“ Hg for vacuum retention
32
HSEB
INNOLAS
Innovative
Lasertechnologie
HSEB
INNOLAS
Innovative
Lasertechnologie
REFERENCES


QUALITY ASSURANCE



on statutory requirements, customer require-







33









-





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
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PROGRAM OF THE -GROUP

controller